A Long Stroke Electromagnetic $XY$ Positioning Stage for Micro Applications
نویسندگان
چکیده
منابع مشابه
A Long Stroke Electromagnetic XY Positioning Stage for Micro Applications
In this paper, a Lorentz force-based XY positioning stage with a stack of four electromagnetic linear motors in parallel configuration is presented. The overall design of the positioning stage consists of a mobile and a fixed part separated using a fourpoint contact technique. The uniqueness of the proposed positioning stage lies in its light design with the ability to perform variable strokes ...
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ژورنال
عنوان ژورنال: IEEE/ASME Transactions on Mechatronics
سال: 2012
ISSN: 1083-4435,1941-014X
DOI: 10.1109/tmech.2011.2142319